"In the deposition process or an etching process that made to be used for the fabrication of LEDs, semiconductors, FPDs and solar cells, various gases are used and the process pressure gives large effect on product quality, so the excellent corrosion resistance, and without gas dependent, and high accuracy are required to vacuum gauge . To provide solutions to these requests, HORIBA STEC has developed the Capacitance Diaphragm Gauge “VG-200 Series”, and the results of the performance evaluation were superior reproducibility and long term stability. Here, we describe the product features and performance evaluation results of the VG-200."
|Full Scale Range|
|Sensor Controled Temperature||55°C/100°C|
|Accuracy Including non-linearity, hysteresis, non-repeatability *||0.5%R.S.||0.25%R.S.|
|Zero Temp. Coefficient|
|Span Temp. Coefficient||0.03%R.S./°C||0.02%R.S./°C|
|Operating Temperature||10°C to 45°C(55°C),10°C to 50°C(100°C)|
|Warm Up time||60min(55°C),120min(100°C)|
|Output||Analog 0-10V, load resistance: 10kΩ or more|
|Supply Voltage||±15VDC ±5% or 24VDC±5% @0.6Amax|
|Setpoint||Contact form: 1a,1b, Number of setpoint: 2 Current charge capacity: 0.1A @30VDC|
* Including non-linearity, hysteresis, non-repeatability at 25℃ ambient temperature after 2hours operation.
|1. Full scale||2. Heater set temperature||3. Fitting|
11T : 1.3332kPa(10Torr)
12T : 13.332kPa(100Torr)
13T : 133.32kPa(1000Torr)
|055 : 55°C|
100 : 100°C
|KF16 : KF16|
8CR : 1/2VCR-F
CF34 : ICF34
● Please choose full scale,heater set temperature and fitting. ● Please contact us If you need alarm initial setting.
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