High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor
The CS-139E is a high-precision chemical concentration monitor designed for use with TMAH/H2O2 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed and a more compact size than anything available to date, and monitors the concentrations of the various components of the SC-1 solutions (TMAH/H2O2/H2O) are used as substitutes for SC-1 on an ongoing basis. Feedback control based on the monitor output is used to keep the concentrations of the TMAH/H2O2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broad range of sample temperatures.
CS-139E: No cooling unit
TMAH/H2O2 (TMAH/H2O2 solution)
Concentration computation principle
Temperature-compensated multivariate analysis
TMAH: 0.00 to 0.50%
Reproducibility (Peak to peak)
TMAH: ± 0.10%
Approx. 2 seconds minimum
20 to 25
1) Temperature level display: TMAH, hydrogen peroxide, water
Maximum current when open collector output is ON: 5 mA
4 to 20 mA (2 outputs: TMAH concentration, H2O2 concentration) *Regardless of the range specifications, the output of 4 ~ 20 mA can be made to correspond to 0 ~ 10% concentrations.
24 V DC ± 10%, 2 A
CS-139E: 205 (W) x 329 (D) x 269 (H) mm
CS-139: Approx. 11 kg
Connection pipe size
For input and exhaust: Outer diameter 3 mm (inner diameter 2 mm)
Nippon Pillar Super type
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