BHF Concentration Monitor
The CS-137 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use BHF solution to etch silicon oxide and remove particles from the wafer surface. The CS-137 continually monitors each component of the BHF solution (NH4F/HF/H2O), alerting the user each time the solution is replaced or replenished. This allows you to maintain the concentration of the BHF solution within the required component ranges, while eliminating unnecessary solution replacement.
Model | CS-137 | ||
CS-137-2503 | CS-137-1003 | ||
Measurement sample | BHF (Hydrofluoric acid/Ammonia fluoride solution) | ||
Measurement principle | Absorption spectrometry | ||
Concentration computation principle | Temperature-compensated multivariate analysis | ||
Measurement range | NH4F: 15.0 to 25.0 % | NH4F: 0.0 to 10.0 % | |
Reproducibility | NH4F: ±0.3 % | NH4F: ±0.3 % | |
(Peak to peak)
| HF: ±0.25 % | HF: ±0.25 % | |
Chemical | Temperature | 20 to 30 °C | |
conditions | Flow rate | 20 to 60 ml/min. | |
| Pressure | 0.10 to 0.20 MPa | |
Measurement cycle | Approx. 3 seconds minimum | ||
Equipment temperature | 20 to 30 °C | ||
Operation panel | 1)Temperature level display: 2)Alarm display (Ammonia fluoride solution, Hydrofluoric acid): 3)Alarm value settings | ||
Serial input/output | RS-232C 2)Alarm value settings | ||
Parallel input | 12 to 30 V DC (photocoupler insulated) | ||
Parallel output | Maximum current when open collector output is ON: 5 mA | ||
Analog output | 4 to 20 mA (2 outputs: NH4F concentration, HF concentration) | ||
Power | 24 V DC ±10%, 2 A | ||
Dimensions | 205 (W) x 329 (D) x 269 (H) mm | ||
8.1 (W) x 13 (D) x 10.6 (H) in | |||
Mass | Approx. 11 kg | ||
Connection pipe size | For inlet and outlet: Outer diameter 6 mm (inner diameter 4 mm) | ||
Pipe connection | Nippon Pillar Super type |
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