Semiconductor Manufacturing Process

Providing Solutions At Every Stage Of The Semiconductor Manufacturing Process From Start To Finish

Semiconductors are the key evolving components in the industry today. HORIBA has kept its sights keenly focused on this micro world. Specialists in each field; HORIBA have pursued proprietary engineering projects in a wide range of areas that include evaluation and analysis, purity of ultra-pure water, composition of liquids and gases, and more broadly, environment and safety. With our sights set clearly on the overall process, we have developed a line-up of analytical equipment, fluid control and measuring systems tailored to every stage of the semiconductor manufacturing process in response to stringent quality control requirements. In all stages, from materials evaluation through to final inspection, HORIBA products help maintain high efficiency in the manufacture of leading-edge electronics devices.

Browse Products

TPNA-500
More TPNA-500

Automatic Total Nitrogen/Phosphorus Monitoring

CODA-500
More CODA-500

Automatic COD Monitor

SLIA-300
More SLIA-300

Highly Sensitive Silica Monitor

CS-150
More CS-150

SPM Monitor

XGT-9000
More XGT-9000

X-ray Analytical Microscope

HF-960EM
More HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

CS-600F
More CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-139E
More CS-139E

High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

LEM-CT-670-G50
More LEM-CT-670-G50

Real Time Interferometric Process Monitor [CCD] Laser Interference Camera

HE-960TM
More HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

UP-100
More UP-100

Micro Volume pH Monitor

CM-200A/210A
More CM-200A/210A

Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CS-153N
More CS-153N

HF/HNO3 Monitor

HE-480R(W)
More HE-480R(W)

Industrial resistivity meter

HP-480(W)
More HP-480(W)

Industrial pH meter

CS-100 Series
More CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-153
More CS-153

FPM Monitor

CS-137
More CS-137

BHF Concentration Monitor

HF-960M
More HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HE-960H-TM
More HE-960H-TM

Wide range TMAH Concentration Monitor

HF-960H
More HF-960H

HF / HCl Concentration Monitor

HE-960HC
More HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-480C-GC
More HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960RW-GC(W)
More HE-960RW-GC(W)

2-Channel Resistivity Meter

HE-960R-GC(W)
More HE-960R-GC(W)

Carbon Sensor Resistivity Meter

CS-131
More CS-131

High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

SC-2 Concentration Monitor, CS-152
More SC-2 Concentration Monitor, CS-152

Semiconductor process monitoring for SC-2 process

HE-960CA
More HE-960CA

Citric Acid Monitor

HE-960LC
More HE-960LC

Carbon Sensor Conductivity Meter

HE-Z-100T
More HE-Z-100T

High Resistivity Meter

CS-700
More CS-700

High Precision, High Stability Chemical Concentration Monitor

HF HD-960L
More HF HD-960L

Dissolved Oxygen Monitor in Low Concentration

HF-SP-CU
More HF-SP-CU

2-channel High Precision HF Concentration Monitor

HZ-960
More HZ-960

Dissolved Ozone Monitor

HE-960H-TM-S
More HE-960H-TM-S

High Precision TMAH Concentration Monitor

XGT-7200
More XGT-7200

X-ray Analytical Microscope

HC-200NH
More HC-200NH

Ammonia Nitrogen Meter

HD-200FL
More HD-200FL

Industrial dissolved oxygen analyzer (Four-Wire Analyzer)

HU-200SS
More HU-200SS

Industrial MLSS meter (Four-Wire Analyzer)

HD-300
More HD-300

Industrial dissolved oxygen analyzer (Two-Wire Transmitter)

HP-300
More HP-300

Industrial pH meter (Two-Wire Transmitter)

HD-200
More HD-200

Industrial dissolved oxygen analyzer (Four-Wire Analyzer)

HO-200
More HO-200

Industrial ORP meter (Four-Wire Analyzer)

HP-200
More HP-200

Industrial pH meter (Four-Wire Analyzer)

HD-480
More HD-480

Industrial dissolved oxygen analyzer (The Slim48 series)

HP-480TP
More HP-480TP

Industrial pH meter - Industrial time sharing proportional control

HE-300R
More HE-300R

Industrial electric resistivity meter (Two-Wire Transmitter)

HE-300C
More HE-300C

Industrial electric conductivity meter (Two-Wire Transmitter)

HE-200R
More HE-200R

Industrial electric resistivity meter (Four-Wire Analyzer)

HE-200C
More HE-200C

Industrial electric conductivity meter (Four-Wire Analyzer)

HE-960RW
More HE-960RW

Industrial resistivity meter

HE-960CW
More HE-960CW

2-channel Sanitary Conductivity Meter (Low Concentration type)

HE-480C
More HE-480C

Industrial conductivity meter (low concentration type)