TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations HE-960TM

TMAH Conductivity Meter HE-960TM

The HE-960TM offers high precision measurement of the conductivity of TMAH (Tetra Methyl Ammonium Hydroxide) solutions, the main component of the photoresist developer that is used in semiconductor and liquid crystal processes.
The HE-960TM is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB. And, with its 4-electrode FES-126Ni dedicated sensor, this unit has a high chemical resistance and offers a wide range of measurement, perfect conditions for measuring TMAH.
 

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide measurement range
  • Sutable temperature compensation for TMAH solution
  • Temperature measurement, simultaneous display function
  • Free transmission output range
  • Utilization of lead-free solder
  • CE Marking compliant

 

 

ModelHE-960TM
Power supplyRated voltage 100 V to 240 V AC, 50/60 Hz, 10 VA (max.)
StructureIndoor-use panel installation type Panel:
IP65 dust and water proof structure
Protective structurePanel: IP65 (IEC60529, JIS C0920)
Conforming standardsCE Marking
FCC Rule
External dimensions96 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
MassApprox. 500 g
Compatible sensorsFES-126Ni conductivity sensor
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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