SEC-R100 Series

Digital Mass Flow Controller SEC-R100 Series

Digital Mass Flow Controller

The digital mass flow controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage, analytical, etc.

With this mass flow controller high accuracy (+/-1.0% S.P.) and performance are achieved without the high cost plus the multi gas/multi range function can be used for the nine most popular gases.

Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available.

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Multi Gas / Multi Range*
    • User can change gas type and full scale range with free software
    • Reduce stock
    • Increased flexibility
  • High Accuracy ±1.0% S.P.
  • ≦1 second response across the full flow rate range
  • High performance Solenoid Valve
  • O-ring material - Viton™
  • Fittings - ¼” Swagelok equivalent
  • Digital / Analog communication
    • Profibus DP-V0
    • Analog 0-5, 0-10 VDC,4-20mA
  • 24 V DC power supply
  • RoHS compliant

*Gas selection from nine gases

 

Model NameSEC-R116SEC-R126

Full-scale flow rate
(N2 conversion flow rate)

< 10LM

< 50LM
Compatible gasN2, O2, Air, H2, He, CH4, C3H8, Ar, CO2
Flow rate control range2-100%F.S.
Accuracy±1.0%S.P (Flow rate >30%F.S.)± 0.3%F.S. (Flow rate ≦ 30%F.S.)
Operation temperature5 to 50 (recommended temperature range: 15 to 45℃)
Response≦ 1second over full flow rate range
Valve typeNormally Closed
Linearitywithin +/- 0.5% of F.S.
Repeatabilitywithin +/- 0.2% of F.S.
Power24VDC (13 to 32VDC)7.5VA
DigitalProfibus DP-V0
Analog0-5(10)VDC, 4-20mA
Standard fitting1/4” Swagelok equivalent
Leak integrity≦1×10-10Pa・m3/s
MAX. Operating pressure450kPa (G)
Operating differential pressure50 to 300kPa (d)>3LM:100 to 300kPa (d)200 to 300kPa (d)
Wetted materialsSUS316L, PTFE, Elastomer, Magnetic Stainless steel and Fluoro Rubber

The precision is that associated with the full-scale MR and MG number values.
The flow rate precision guaranteed temperatures confirm to Semiconductor standard.
For details, please contact us.

 

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Digital Mass Flow Controller SEC-R100 Series Brochure
CategoryDocuments
Size 1.38 MB
FiletypePDF

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