High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E

The CS-139E is a high-precision chemical concentration monitor designed for use with TMAH/H2O2 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed and a more compact size than anything available to date, and monitors the concentrations of the various components of the SC-1 solutions (TMAH/H2O2/H2O)  are used as substitutes for SC-1 on an ongoing basis. Feedback control based on the monitor output is used to keep the concentrations of the TMAH/H2O2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broad range of sample temperatures.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • A measurement cycle of approx. 3 seconds supports concentration management for 300 mm processes.
    A very short measurement cycle* of approximately two seconds means fast response. Frequent feedback for both single-bath and batch type cleaning devices is supported.
    *Does not include chemical replacement and cooling times.
  • The compact design means less space is needed for the cleaning device.
    Because of the compact design, only two-thirds (*) the conventional floor area is required, so less space is needed for the cleaning device. The monitor can be easily integrated with the cleaning device.
    *Based on comparison with the CS-220 series by HORIBA.
  • Fewer lot defects in the cleaning process mean a higher yield.
    Output from the monitor is used for replenishment control of the TMAH/H2O2 solutions, enabling cleaning with a high reproducibility rate. There are fewer defects in the cleaning process, and this helps boost the overall yield.
  • Fully automatic measurement and simple control.
    All the user has to do is prepare the TMAH/H2O2 solution. Measurement is fully automatic, so no control whatsoever is required once the measurement has begun. In addition, air is used for reference spectral measurement, so a utility water supply is not needed.
  • Comprehensive measures to eliminate air bubbles enable measurement of high-temperature samples.
    Air bubbles are separated out in a bubble removing tank, while an electromagnetic valve minimizes mixing of air bubbles in the flow cell during measurement. If the monitor has an integrated cooling unit, high-temperature samples can be sent directly to the monitor. Temperature compensation is carried out automatically.
  • 24 V DC used for higher safety assurance.
    Low-voltage 24 V DC is used for the power supply, offering improved safety and protection from electrical shock. An internal leakage sensor can be installed to detect water leaks, so that the supply of TMAH/H2O2 solutions can be shut off in the event of an emergency.

 

 

Model specifications

CS-139E: No cooling unit
CS-139EC: Integrated cooling unit

Measurement sample

TMAH/H2O2 (TMAH/H2O2 solution)

Measurement principle

Absorption spectrometry

Concentration computation principle

Temperature-compensated multivariate analysis

Measurement range

TMAH: 0.00 to 0.50%
H2O2: 0.00 to 2.00%
H2O: 97.5 to 100.0%
Please consult HORIBA for information concerning other measurement ranges.

Reproducibility (Peak to peak)

TMAH: ± 0.10%
H2O2: ± 0.25%
H2O: ± 1.0%

Chemical conditions

CS-139E:
Temperature: 20 to 30°C
Flow rate: 20 to 60 mL/min.
Pressure: 0.10 to 0.20 MPa


CS-139EC:
Temperature: 20 to 80°C
Flow rate: 20 to 40 mL/min.
Pressure: 0.10 to 0.20 MPa

Measurement cycle

Approx. 2 seconds minimum
(not including chemical replacement and cooling times)

Equipment temperature

20 to 25

Operation panel

1) Temperature level display: TMAH, hydrogen peroxide, water
2) Alarm display: TMAH, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit
3) Alarm value settings: TMAH, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit

Serial input/output

RS-232C
1) Concentration data: TMAH, hydrogen peroxide
2) Alarm value settings: TMAH, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit Parallel input 12 to 30 V DC (photocoupler insulated) Parallel concentration alarm (ON/OFF)

Parallel output

Maximum current when open collector output is ON: 5 mA
Maximum voltage when open collector output is OFF: 30 V
1) Alarm output: TMAH, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit
2) Device error
3) Liquid leakage

Analog output

4 to 20 mA (2 outputs: TMAH concentration, H2O2 concentration) *Regardless of the range specifications, the output of 4 ~ 20 mA can be made to correspond to 0 ~ 10% concentrations.
(Please specify when ordering.)

Power supply

24 V DC ± 10%, 2 A

Dimensions

CS-139E: 205 (W) x 329 (D) x 269 (H) mm
CS-139EC: 291 (W) x 329 (D) x 269 (H) mm

Weight

CS-139: Approx. 11 kg
CS-139EC: Approx. 12 kg

Connection pipe size

For input and exhaust: Outer diameter 3 mm (inner diameter 2 mm)

Pipe connection

Nippon Pillar Super type

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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