High-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131

SC-1 Monitor, CS-131

The CS-131 is a high-precision chemical concentration monitor designed for use with SC-1 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed in a more compact size than anything available to date. The CS-131 monitors the concentrations of the individual components of the SC-1 solutions (NH3/H2O2/H2O) which is widely used to remove particles and organic substances. The monitor has a number of outputs which can be utilized to keep the concentrations of the individual elements of the SC-1 solutions within the allowable ranges; this eliminates unnecessary replacement of chemicals potentially increasing bath life time and reducing chemical cost. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broader range of sample temperatures

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

A measurement cycle of approx. 2 seconds supports concentration management for 300 mm processes.
A very short measurement cycle* of approximately two seconds means fast response. Frequent feedback for both single-bath and batch type cleaning devices is supported.
*Does not include chemical replacement and cooling times.

The compact design of the CS-131, only two-thirds* of previous models allow for easy integration into your wafer cleaning system.
*Compared to the CS-220 series.

Fewer lot defects in the cleaning process means a higher yield
Outputs from the monitor are used for replenishment control of the SC-1 solutions, enabling cleaning with a high reproducibility rate. There are fewer defects in the cleaning process, this helps boost the overall yield.

Fully automated measurement for simplifies control.
Measurement is fully automatic; no control is required once the system has been installed and measurement has begun. Air is used for reference spectral measurement removing the need of a utility water supply.

Comprehensive counter measures to eliminate air bubbles enable the CS-131 to measure of high-temperature samples.
Air bubbles are separated out in a bubble removing tank, while an electromagnetic valve minimizes mixing of air bubbles in the flow cell during measurement. If the monitor has an integrated cooling unit, high-temperature samples can be measured directly. Temperature compensation is carried out automatically.

Low-voltage 24 V DC is used for the power supply, offering improved safety and protection from electrical shock. An internal leakage sensor can be installed to detect leaks; the supply of the SC-1 solutions can then be shut off in the event of an emergency.
 

Model specificationsCS-131: No cooling unit
 CS-131C: Integrated cooling unit
Measurement sampleSC-1 (ammonia/hydrogen peroxide aqueous solution)
Measurement principleAbsorption spectrometry
Concentration computation principleTemperature-compensated multivariate analysis
Measurement rangeNH3: 0.00 to 5.00%
 H2O2: 0.0 to 10.00%
 H2O: 85.0 to 100.0%
 Please consult HORIBA for information concerning other measurement ranges.
Reproducibility (Peak to peak)NH3: ± 0.25%
 H2O2: ± 0.3%
 H2O: ± 1.5%
Chemical conditionsCS-131:
 Temperature: 20 to 30°C
 Flow rate: 20 to 60 mL/min.
 Pressure: 0.10 to 0.20 MPa
 CS-131C:
 Temperature: 20 to 80°C
 Flow rate: 20 to 40 mL/min.
 Pressure: 0.10 to 0.20 MPa
Measurement cycleApprox. 2 seconds minimum
 (not including chemical replacement and cooling times)
Equipment temperature20 to 25
Operation panel1) Temperature level display: Ammonia, hydrogen peroxide, water
 2) Alarm display: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit
 3) Alarm value settings: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit
Serial input/outputRS-232C
 1) Concentration data: Ammonia, hydrogen peroxide
 2) Alarm value settings: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit Parallel input 12 to 30 V DC (photocoupler insulated) Parallel concentration alarm (ON/OFF)
Parallel outputMaximum current when open collector output is ON: 5 mA
 Maximum voltage when open collector output is OFF: 30 V
 1) Alarm output: Ammonia, hydrogen peroxide: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit
 2) Device error
 3) Liquid leakage
Analog output4 to 20 mA (2 outputs: NH3 concentration, H2O2 concentration) *Regardless of the range specifications, the output of 4 ~ 20 mA can be made to correspond to 0 ~ 10% concentrations.
 (Please specify when ordering.)
Power supply24 V DC ± 10%, 2 A
DimensionsCS-131: 205 (W) x 329 (D) x 269 (H) mm
 CS-131C: 291 (W) x 329 (D) x 269 (H) mm
WeightCS-131: Approx. 11 kg
 CS-131C: Approx. 12 kg
Connection pipe sizeFor input and exhaust: Outer diameter 3 mm (inner diameter 2 mm)
Pipe connectionNippon Pillar Super type
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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