HF / HCl Concentration Monitor HF-960H

HF / HCl Concentration Monitor HF-960H

Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Measurement range : 0 - 10 %
  • Automatic display range switching
  • Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
  • 24 V DC power supply
  • RoHS compliant

 

 

ModelHF-960H
Measurement rangeHF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 Series (flow-type carbon sensor)

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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