Carbon Sensor Resistivity Meter HE-960R-GC(W)

Carbon Sensor Resistivity Meter HE-960R-GC(W)

The HE-960R-GC(W) is resistivity meter to use glass carbon for its sensor.
A glass carbon sensor is not contaminated by metal elution and is chemically resistant to such wet cleaning solutions as hydrofluoric acid and hydrogen peroxide. This is especially effective for resistivity measurement in the rinse process of single-bath cleaning systems and it enables high quality control in the cleaning process.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Superior chemical resistance
  • Free form metal contamination
  • High-speed response
  • Selectable temperature compensation function
  • Utilization of lead-free solder
  • DC 24 V power source
  • CE Marking compliant

 

 

ModelHE-960R-GC(W)
Measurement range0.000 - 0.200 / 0.00 - 2.00 / 0.00 - 20.00 / 0.0 - 100.0 MΩ・cm
Power supplyRated voltage 24 V DC 5 W (max)
StructureIndoor-use panel installation type
Panel: IP65 dust and water proof structure
Protective structurePanel: IP65 (IEC60529, JIS C0920)
Conforming standardsCE Marking
FCC Rule
External dimensions96 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
MassApprox. 500 g
Compatible sensorsERF-series specific resistance GC sensor

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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