Carbon Sensor Conductivity Meter HE-960LC

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC

Can measures conductivity of low concentration. Its dual calculation circuits and software, combined with carbon sensors, enable measurements ranging without switching. The HE-960LC can be used as a process concentration meter, and also to monitor changes in the concentration of specified chemicals.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide range compatibility:
        0 - 1000 μS/cm, 0 - 10000 μS/cm (Sensor FS-07F).
  • Automatic display range switching
  • Accommodates various types of temperature compensation
  • Concentration conversion function 
  • Chemical resistant two-electrode carbon sensor

 

 

Specificationd of HE-960LC
ModelHE-960LC
Measurement range0 - 1000 μS/cm (cell constant: 0.1/cm)*
0 - 10000 μS/cm (cell constant: 1/cm)*
RepeatabilityCell constant0.1/cm1.0/cm
0 to 1000 µS/cm+/- 0.5% FS-
0 to 2000 µS/cm-+/- 0.5% FS
2000 to 10000 µS/cm-+/- 0.5% FS
0.0 to 100 deg.C+/- 0.5 deg.C

* Measurement range of raw conductivity

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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